http://ridl.cfd.rit.edu/products/manuals/CTI/8040518_Decon%20Procedure_Rev%20C.pdf WebJan 14, 2013 · ©2013 Brooks Automation Inc. Pub. No. 8040613, Rev. AA, 01/14/2013 ECO No. 63723 3-v Cryo-Torr® Pump Installation, Operation and Maintenance Instructions
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Web1.Cautions about pressure. A cryopump can store large amount of condensable gases inside. However, it is dangerous to warm up a sealed cryopump as the inner pressure may reach several MPaG. To prevent an explosion, CRYO-U cryopump is provided with a pressure relief valve which starts opening at 10kPa (gage) and fully opens at 20kPa (gage). WebOn-Board Cryopump. 30 min-utes for each additional On-Board Cryopump. Maximum 2. Decontamination of only cold On-Board Cryopumps Only one On-Board Cryopump needs to be cold. 45 minutes to decontaminate the first cold On-Board Cryopump 30 minutes for each additional cold On-Board Cryopump. Acceptable 3. Simultaneous … how much screen time for 6 year old
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WebThe entire scope of a refrigerator cryopump is shown in Fig. 2.65 and consists of the compressor unit (1) which is linked via flexible pressure lines (2) – and thus vibration-free – to the cryopump (3). The cryopump itself consists of the pump casing and the cold head within. Helium is used as the refrigerant which circulates in a closed ... WebEdwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation - known as the world standard for reliability and performance. On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time. WebCT20HP : Inlet Flange : ISO-F 500.0 mm (19.685 in) Foreline Flange : KF 25.0 mm (0.984 in) Pumping Speed Water Vapor : Pumping Speed Argon : Pumping Speed Air : … how much screen time for teens